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Cover of Electronics and Structures for MEMS 27-29 October 1999, Royal Pines Resort, Queensland, Australia

Public book details

Electronics and Structures for MEMS 27-29 October 1999, Royal Pines Resort, Queensland, Australia

Neil W. Bergmann, Olaf Reinhold, Norman C. Tien

Publisher
SPIE
Publication date
1999
Pages
428
Language
en
Format
Paperback
Science
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Synopsis · may contain spoilers

A selection of 51 papers on various aspects of the electronics and structures used in the field of microelectromechanical systems.

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